Novel mechanisms for millimeter range piston actuation of vertical micromirrors and microlenses

TitleNovel mechanisms for millimeter range piston actuation of vertical micromirrors and microlenses
Publication TypeConference Paper
Year of Publication2012
AuthorsPal, S., S. Samuelson, and H. Xie
Conference NameInternational Conference on Optical MEMS and Nanophotonics
Conference LocationBanff, Alberta, Canada