Title | Process Dependence of 1/f Noise and Defects in Ion Implanted p-Type Piezoresistors |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Dieme, R., J. Zhang, N. G. Rudawski, K. Jones, G. Bosman, M. Sheplak, and T. Nishida |
Journal | Journal of Applied Physics |
Volume | 112 |
Start Page | 033702 |
DOI | 10.1063 |