Title | Microelectromechanical inductors with high inductance density via mechanical energy storage |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Divakar, V., Y. Zhang, J. Zito, E. A. Salley, and D. P. Arnold |
Journal | J. Micromech. Microeng. |
Volume | 22 |
Start Page | 094003 |
Pagination | 11 |
Date Published | 08/2012 |
Refereed Designation | Refereed |