Microelectromechanical inductors with high inductance density via mechanical energy storage

TitleMicroelectromechanical inductors with high inductance density via mechanical energy storage
Publication TypeJournal Article
Year of Publication2012
AuthorsDivakar, V., Y. Zhang, J. Zito, E. A. Salley, and D. P. Arnold
JournalJ. Micromech. Microeng.
Volume22
Start Page094003
Pagination11
Date Published08/2012
Refereed DesignationRefereed