| Title | Increased multilayer fabrication and RF characterization of a high density stacked MIM capacitor based on selective etching |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Journal | IEEE Trans. Electron Devices |
| Volume | 61 |
| Title | Increased multilayer fabrication and RF characterization of a high density stacked MIM capacitor based on selective etching |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Journal | IEEE Trans. Electron Devices |
| Volume | 61 |