Title | MEMS mirrors submerged in liquid for wide-angle scanning |
Publication Type | Conference Paper |
Year of Publication | 2015 |
Authors | Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie |
Conference Name | TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
Date Published | 2015 |
Publisher | IEEE |
Conference Location | Anchorage, AK, USA |
DOI | 10.1109/TRANSDUCERS.2015.7181056 |
Refereed Designation | Refereed |