MEMS mirrors submerged in liquid for wide-angle scanning

TitleMEMS mirrors submerged in liquid for wide-angle scanning
Publication TypeConference Paper
Year of Publication2015
AuthorsZhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie
Conference NameTRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Date Published2015
PublisherIEEE
Conference LocationAnchorage, AK, USA
DOI10.1109/TRANSDUCERS.2015.7181056
Refereed DesignationRefereed