Title | A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror |
Publication Type | Conference Paper |
Year of Publication | 2015 |
Authors | Wang, W., J. Chen, A.S. Zivkovic, C. Duan, and H. Xie |
Conference Name | TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
Date Published | 7/2015 |
Publisher | IEEE |
Conference Location | Anchorage, AK, USA |
DOI | 10.1109/TRANSDUCERS.2015.7180899 |
Refereed Designation | Refereed |