A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror

TitleA silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror
Publication TypeConference Paper
Year of Publication2015
AuthorsWang, W., J. Chen, A.S. Zivkovic, C. Duan, and H. Xie
Conference NameTRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Date Published7/2015
PublisherIEEE
Conference LocationAnchorage, AK, USA
DOI10.1109/TRANSDUCERS.2015.7180899
Refereed DesignationRefereed