| Title | Simultaneous piston position and tilt angle sensing for large vertical displacement micromirrors by frequency detection inductive sensing |
| Publication Type | Journal Article |
| Year of Publication | 2015 |
| Authors | Tseng, V. F. G., and H. Xie |
| Journal | Applied Physics Letters |
| Volume | 107 |
| Issue | 21 |
| Pagination | 214102 |
| Date Published | 11/2015 |
| ISSN | 1077-3118 |
| DOI | 10.1063/1.4936375 |
| Short Title | Appl. Phys. Lett. |
| Refereed Designation | Refereed |
