Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors

TitleResonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors
Publication TypeJournal Article
Year of Publication2015
AuthorsTseng, V. Farm- Guoo, and H. Xie
JournalJournal of Microelectromechanical Systems
Pagination1 - 10
Date Published11/2015
ISSN1941-0158
DOI10.1109/JMEMS.2015.2499301
Short TitleJ. Microelectromech. Syst.
Refereed DesignationRefereed