| Title | Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors |
| Publication Type | Journal Article |
| Year of Publication | 2015 |
| Authors | Tseng, V. Farm- Guoo, and H. Xie |
| Journal | Journal of Microelectromechanical Systems |
| Pagination | 1 - 10 |
| Date Published | 11/2015 |
| ISSN | 1941-0158 |
| DOI | 10.1109/JMEMS.2015.2499301 |
| Short Title | J. Microelectromech. Syst. |
| Refereed Designation | Refereed |
