Title | Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors |
Publication Type | Journal Article |
Year of Publication | 2015 |
Authors | Tseng, V. Farm- Guoo, and H. Xie |
Journal | Journal of Microelectromechanical Systems |
Pagination | 1 - 10 |
Date Published | 11/2015 |
ISSN | 1941-0158 |
DOI | 10.1109/JMEMS.2015.2499301 |
Short Title | J. Microelectromech. Syst. |
Refereed Designation | Refereed |