| Title | Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Tseng, V. Farm- Guoo, and H. Xie |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 25 |
| Start Page | 207 |
| Issue | 1 |
| Pagination | 207 - 216 |
| Date Published | 2/2016 |
| ISSN | 1941-0158 |
| DOI | 10.1109/JMEMS.2015.2499301 |
| Short Title | J. Microelectromech. Syst. |
| Refereed Designation | Refereed |
