| Title | A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives |
| Publication Type | Conference Paper |
| Year of Publication | 2016 |
| Authors | Zhang, X., L. Zhou, and H. Xie |
| Conference Name | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Date Published | 01/2016 |
| Publisher | IEEE |
| Conference Location | Shanghai, China |
| DOI | 10.1109/MEMSYS.2016.7421560 |
| Refereed Designation | Refereed |
