Title | Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers |
Publication Type | Journal Article |
Year of Publication | 2016 |
Authors | Han, F., W. Wang, X. Zhang, and H. Xie |
Journal | Journal of Microelectromechanical Systems |
Volume | 4 |
Pagination | 750-760 |
Date Published | 2016 |
ISSN | 1941-0158 |
DOI | 10.1109/JMEMS.2016.2565388 |
Short Title | J. Microelectromech. Syst. |
Refereed Designation | Refereed |