Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

TitleModeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers
Publication TypeJournal Article
Year of Publication2016
AuthorsHan, F., W. Wang, X. Zhang, and H. Xie
JournalJournal of Microelectromechanical Systems
Volume4
Pagination750-760
Date Published2016
ISSN1941-0158
DOI10.1109/JMEMS.2016.2565388
Short TitleJ. Microelectromech. Syst.
Refereed DesignationRefereed