Title | High-Q energy trapping of temperature-stable shear waves with Lamé cross-sectional polarization in a single crystal silicon waveguide |
Publication Type | Journal Article |
Year of Publication | 2016 |
Authors | Tabrizian, R., A. Daruwalla, and F. Ayazi |
Journal | Applied Physics Letters |
Volume | 108 |
Issue | 11 |
Pagination | 113503 |
Date Published | 03/2016 |
ISSN | 1077-3118 |
DOI | 10.1063/1.4944408 |
Short Title | Appl. Phys. Lett. |