High-Q energy trapping of temperature-stable shear waves with Lamé cross-sectional polarization in a single crystal silicon waveguide

TitleHigh-Q energy trapping of temperature-stable shear waves with Lamé cross-sectional polarization in a single crystal silicon waveguide
Publication TypeJournal Article
Year of Publication2016
AuthorsTabrizian, R., A. Daruwalla, and F. Ayazi
JournalApplied Physics Letters
Volume108
Issue11
Pagination113503
Date Published03/2016
ISSN1077-3118
DOI10.1063/1.4944408
Short TitleAppl. Phys. Lett.