Power-Insensitive Silicon Crystal-Cut for Amplitude-Stable Frequency Synthesis

This paper reports on theoretical predication and experimental validation of a power-insensitive silicon crystal-cut for realization of amplitude-stable resonators. Waveguide-based resonators compensated for geometrical nonlinearities and aligned to this cut benefit from its fully-harmonic elasticity and demonstrate an extended linear operating range. An 80 MHz prototype, with a Q of 7000, is presented showing a 1dB compression point at 29 dBm, which is 50 × higher compared to <100> counterpart