Power-Insensitive Silicon Crystal-Cut for Amplitude-Stable Frequency Synthesis

TitlePower-Insensitive Silicon Crystal-Cut for Amplitude-Stable Frequency Synthesis
Publication TypeConference Paper
Year of Publication2017
AuthorsGhatge, M., P. Karri, and R. Tabrizian
Conference NameIEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017)
Abstract

This paper reports on theoretical predication and experimental validation of a power-insensitive silicon crystal-cut for realization of amplitude-stable resonators. Waveguide-based resonators compensated for geometrical nonlinearities and aligned to this cut benefit from its fully-harmonic elasticity and demonstrate an extended linear operating range. An 80 MHz prototype, with a Q of 7000, is presented showing a 1dB compression point at 29 dBm, which is 50 × higher compared to <100> counterpart

Refereed DesignationRefereed