Fabrication and Characterization of a Flush-Mount MEMS Piezoelectric Dynamic Pressure Sensor and Associated Package for Aircraft Fuselage Arrays

TitleFabrication and Characterization of a Flush-Mount MEMS Piezoelectric Dynamic Pressure Sensor and Associated Package for Aircraft Fuselage Arrays
Publication TypeConference Paper
Year of Publication2017
AuthorsReagan, T., J. Meloy, J. R. Underbrink, and M. Sheplak
Conference Name55th AIAA Aerospace Sciences Meeting55th AIAA Aerospace Sciences Meeting
Date Published01/2017
PublisherAmerican Institute of Aeronautics and Astronautics
Conference LocationGrapevine, Texas
URLhttp://arc.aiaa.org/doi/abs/10.2514/6.2017-0477
DOI10.2514/6.2017-0477