Title | Fabrication of Microscale Rotating Magnetic Machines |
Publication Type | Book Chapter |
Year of Publication | 2009 |
Authors | Arnold, D. P., and M. G. Allen |
Book Title | Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines |
Publisher | Springer |
City | New York |
Other Numbers | pp. 157-190 |