Fabrication of Microscale Rotating Magnetic Machines

TitleFabrication of Microscale Rotating Magnetic Machines
Publication TypeBook Chapter
Year of Publication2009
AuthorsArnold, D. P., and M. G. Allen
Book TitleMulti-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
PublisherSpringer
CityNew York
Other Numberspp. 157-190