TEMPERATURE DEPENDENCE OF MULTIMODE GALLIUM NITRIDE/ALUMINUM NITRIDE (GaN/AlN) HETEROSTRUCTURE STRING RESONATOR

TitleTEMPERATURE DEPENDENCE OF MULTIMODE GALLIUM NITRIDE/ALUMINUM NITRIDE (GaN/AlN) HETEROSTRUCTURE STRING RESONATOR
Publication TypeConference Paper
Year of Publication2021
AuthorsSui, W., X-Q. Zheng, J-T. Lin, B. W. Alphenaar, and P. X. - L. Feng
Conference NameIEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Date PublishedMarch 2021
URLhttps://ieeexplore.ieee.org/document/9375389
DOI10.1109/MEMS51782.2021.9375389