Title | Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 C Up to 325 C |
Publication Type | Journal Article |
Year of Publication | 2021 |
Authors | Sui, W., X-Q. Zheng, J-T. Lin, B. W. Alphenaar, and P. X. - L. Feng |
Journal | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS |
Volume | 30 |
Start Page | 521 |
Issue | 4 |
Date Published | June 25, 2021 |
Type of Article | Research Article |
URL | https://ieeexplore.ieee.org/document/9464902 |
DOI | 10.1109/JMEMS.2021.3089703 |