Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 C Up to 325 C

TitleThermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 C Up to 325 C
Publication TypeJournal Article
Year of Publication2021
AuthorsSui, W., X-Q. Zheng, J-T. Lin, B. W. Alphenaar, and P. X. - L. Feng
JournalJOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume30
Start Page521
Issue4
Date PublishedJune 25, 2021
Type of ArticleResearch Article
URLhttps://ieeexplore.ieee.org/document/9464902
DOI10.1109/JMEMS.2021.3089703