Effects of Ion-Induced Displacement Damage on GaN/AlN MEMS Resonators

TitleEffects of Ion-Induced Displacement Damage on GaN/AlN MEMS Resonators
Publication TypeJournal Article
Year of Publication2022
AuthorsSui, W., X-Q. Zheng, J-T. Lin, J. Lee, J. L. Davidson, R. A. Reed, R. D. Schrimpf, B. W. Alphenaar, M. L. Alles, and P. X. - L. Feng
JournalIEEE TRANSACTIONS ON NUCLEAR SCIENCE
Volume69
Start Page216
Issue3
Date PublishedJanuary 14, 2022
Type of ArticleResearch Article
URLhttps://ieeexplore.ieee.org/document/9682706
DOI10.1109/TNS.2022.3143550.