Title | Effects of Ion-Induced Displacement Damage on GaN/AlN MEMS Resonators |
Publication Type | Journal Article |
Year of Publication | 2022 |
Authors | Sui, W., X-Q. Zheng, J-T. Lin, J. Lee, J. L. Davidson, R. A. Reed, R. D. Schrimpf, B. W. Alphenaar, M. L. Alles, and P. X. - L. Feng |
Journal | IEEE TRANSACTIONS ON NUCLEAR SCIENCE |
Volume | 69 |
Start Page | 216 |
Issue | 3 |
Date Published | January 14, 2022 |
Type of Article | Research Article |
URL | https://ieeexplore.ieee.org/document/9682706 |
DOI | 10.1109/TNS.2022.3143550. |