Title | Intrinsically Tunable Laminated Ferroelectric Scandium Aluminum Nitride Extensional Resonator Based on Local Polarization Switching |
Publication Type | Conference Paper |
Year of Publication | 2022 |
Authors | Dabas, S., D. Mo, S. Rassay, and R. Tabrizian |
Conference Name | 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) |
Publisher | IEEE |
Conference Location | Tokyo, Japan |
URL | https://ieeexplore.ieee.org/document/9699790/http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699790.pdf?arnumber=9699790 |
DOI | 10.1109/MEMS51670.2022.9699790 |