Intrinsically Tunable Laminated Ferroelectric Scandium Aluminum Nitride Extensional Resonator Based on Local Polarization Switching

TitleIntrinsically Tunable Laminated Ferroelectric Scandium Aluminum Nitride Extensional Resonator Based on Local Polarization Switching
Publication TypeConference Paper
Year of Publication2022
AuthorsDabas, S., D. Mo, S. Rassay, and R. Tabrizian
Conference Name2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
PublisherIEEE
Conference LocationTokyo, Japan
URLhttps://ieeexplore.ieee.org/document/9699790/http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699790.pdf?arnumber=9699790
DOI10.1109/MEMS51670.2022.9699790