Acoustically Coupled Wideband RF Filters with Bandwidth Reconfigurablity Using Ferroelectric Aluminum Scandium Nitride Film

TitleAcoustically Coupled Wideband RF Filters with Bandwidth Reconfigurablity Using Ferroelectric Aluminum Scandium Nitride Film
Publication TypeConference Paper
Year of Publication2020
AuthorsRassay, S., F. Hakim, M. Ramezani, and R. Tabrizian
Conference Name2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Conference LocationVancouver, BC, Canada
URLhttps://ieeexplore.ieee.org/document/9056353/http://xplorestaging.ieee.org/ielx7/9039791/9056108/09056353.pdf?arnumber=9056353
DOI10.1109/MEMS46641.2020.9056353