Intrinsically Switchable Ferroelectric Scandium Aluminum Nitride Bulk Acoustic Wave Resonators

TitleIntrinsically Switchable Ferroelectric Scandium Aluminum Nitride Bulk Acoustic Wave Resonators
Publication TypeConference Paper
Year of Publication2021
AuthorsMo, D., S. Rassay, and R. Tabrizian
Conference Name2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
PublisherIEEE
Conference LocationOrlando, FL, USA
URLhttps://ieeexplore.ieee.org/document/9495634/http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495634.pdf?arnumber=9495634
DOI10.1109/Transducers50396.2021.9495634