Title | Intrinsically Switchable Ferroelectric Scandium Aluminum Nitride Bulk Acoustic Wave Resonators |
Publication Type | Conference Paper |
Year of Publication | 2021 |
Authors | Mo, D., S. Rassay, and R. Tabrizian |
Conference Name | 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
Publisher | IEEE |
Conference Location | Orlando, FL, USA |
URL | https://ieeexplore.ieee.org/document/9495634/http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495634.pdf?arnumber=9495634 |
DOI | 10.1109/Transducers50396.2021.9495634 |