| Title | Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates |
| Publication Type | Journal |
| Year of Publication | 2018 |
| Authors | Walters, G., A. Shekhawat, N. G. Rudawski, S. Moghaddam, and T. Nishida |
| DOI | 10.1063/1.5027516 |
