| Title | Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films |
| Publication Type | Journal |
| Year of Publication | 2020 |
| Authors | Walters, G., A. Shekhawat, J. Jones, S. Moghaddam, and T. Nishida |
| DOI | 10.1063/1.5135709 |
| Title | Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films |
| Publication Type | Journal |
| Year of Publication | 2020 |
| Authors | Walters, G., A. Shekhawat, J. Jones, S. Moghaddam, and T. Nishida |
| DOI | 10.1063/1.5135709 |