Title | Effect of Forming Gas Furnace Annealing on the Ferroelectricity and Wake-Up Effect of Hf0.5Zr0.5O2 Thin Films |
Publication Type | Journal |
Year of Publication | 2020 |
Authors | Shekhawat, A., G. Walters, C. Chang Chung, Y. Liu, R. Garcia, J. Jones, T. Nishida, and S. Moghaddam |
DOI | 10.1149/2162-8777/ab6b13 |