Title | A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning |
Publication Type | Journal Article |
Year of Publication | 2020 |
Authors | Zhou, L., X. Yu, P. Feng, J. Li, and H. Xie |
Journal | Optics Express |
Date Published | Jul-22-2020 |
URL | https://www.osapublishing.org/oe/abstract.cfm?doi=10.1364/OE.400363 |
DOI | 10.1364/OE.400363 |
Short Title | Opt. Express |