A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR

TitleA Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR
Publication TypeConference Paper
Year of Publication2019
AuthorsWang, D., C. A. Watkins, M. Aradhya, S. Koppal, and H. Xie
Conference Name2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN)
PublisherIEEE
Conference LocationDaejeon, Korea (South)
ISBN Number978-1-7281-4501-3
URLhttps://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=8918714https://ieeexplore.ieee.org/document/8925039/http://xplorestaging.ieee.org/ielx7/8918714/8925012/08925039.pdf?arnumber=8925039
DOI10.1109/OMN45833.201910.1109/OMN.2019.8925039