An Electrothermal Micromirror with J-shaped Bimorph Microactuators

TitleAn Electrothermal Micromirror with J-shaped Bimorph Microactuators
Publication TypeConference Paper
Year of Publication2019
AuthorsZhou, L., D. Wang, and H. Xie
Conference Name2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN)
PublisherIEEE
Conference LocationDaejeon, Korea (South)
ISBN Number978-1-7281-4501-3
URLhttps://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=8918714https://ieeexplore.ieee.org/document/8925056/http://xplorestaging.ieee.org/ielx7/8918714/8925012/08925056.pdf?arnumber=8925056
DOI10.1109/OMN45833.201910.1109/OMN.2019.8925056