Title | An Electrothermal Micromirror with J-shaped Bimorph Microactuators |
Publication Type | Conference Paper |
Year of Publication | 2019 |
Authors | Zhou, L., D. Wang, and H. Xie |
Conference Name | 2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN) |
Publisher | IEEE |
Conference Location | Daejeon, Korea (South) |
ISBN Number | 978-1-7281-4501-3 |
URL | https://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=8918714https://ieeexplore.ieee.org/document/8925056/http://xplorestaging.ieee.org/ielx7/8918714/8925012/08925056.pdf?arnumber=8925056 |
DOI | 10.1109/OMN45833.201910.1109/OMN.2019.8925056 |