Title | A Robust Compact Lens Scanner with Large Tunable Range |
Publication Type | Conference Paper |
Year of Publication | 2020 |
Authors | Zhou, L., X. Yu, and H. Xie |
Conference Name | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) |
Publisher | IEEE |
Conference Location | Vancouver, BC, Canada |
URL | https://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=9039791https://ieeexplore.ieee.org/document/9056364/http://xplorestaging.ieee.org/ielx7/9039791/9056108/09056364.pdf?arnumber=9056364 |
DOI | 10.1109/MEMS46641.2020.9056364 |