A Robust Compact Lens Scanner with Large Tunable Range

TitleA Robust Compact Lens Scanner with Large Tunable Range
Publication TypeConference Paper
Year of Publication2020
AuthorsZhou, L., X. Yu, and H. Xie
Conference Name2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Conference LocationVancouver, BC, Canada
URLhttps://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=9039791https://ieeexplore.ieee.org/document/9056364/http://xplorestaging.ieee.org/ielx7/9039791/9056108/09056364.pdf?arnumber=9056364
DOI10.1109/MEMS46641.2020.9056364