Title | A Novel Out-of-Plane Electrothermal Bistable Microactuator |
Publication Type | Conference Paper |
Year of Publication | 2019 |
Authors | Zhou, L., and H. Xie |
Conference Name | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII |
Publisher | IEEE |
Conference Location | Berlin, Germany |
URL | https://ieeexplore.ieee.org/document/8808360/http://xplorestaging.ieee.org/ielx7/8787960/8808173/08808360.pdf?arnumber=8808360 |
DOI | 10.1109/TRANSDUCERS.2019.8808360 |