A Novel Out-of-Plane Electrothermal Bistable Microactuator

TitleA Novel Out-of-Plane Electrothermal Bistable Microactuator
Publication TypeConference Paper
Year of Publication2019
AuthorsZhou, L., and H. Xie
Conference Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
PublisherIEEE
Conference LocationBerlin, Germany
URLhttps://ieeexplore.ieee.org/document/8808360/http://xplorestaging.ieee.org/ielx7/8787960/8808173/08808360.pdf?arnumber=8808360
DOI10.1109/TRANSDUCERS.2019.8808360