Title | High-temperature and high-field cycling reliability of PZT films embedded within 130 nm CMOS |
Publication Type | Conference Paper |
Year of Publication | 2018 |
Authors | Walters, G., P. Chojecki, A. Garraud, T. Nishida, S. Summerfelt, J. A. Rodriguez, and A. G. Acosta |
Conference Name | 2018 IEEE International Reliability Physics Symposium (IRPS)2018 IEEE International Reliability Physics Symposium (IRPS) |
Publisher | IEEE |
Conference Location | Burlingame, CA |
URL | https://ieeexplore.ieee.org/document/8353676/ |
DOI | 10.1109/IRPS.2018.8353676 |