High-temperature and high-field cycling reliability of PZT films embedded within 130 nm CMOS

TitleHigh-temperature and high-field cycling reliability of PZT films embedded within 130 nm CMOS
Publication TypeConference Paper
Year of Publication2018
AuthorsWalters, G., P. Chojecki, A. Garraud, T. Nishida, S. Summerfelt, J. A. Rodriguez, and A. G. Acosta
Conference Name2018 IEEE International Reliability Physics Symposium (IRPS)2018 IEEE International Reliability Physics Symposium (IRPS)
PublisherIEEE
Conference LocationBurlingame, CA
URLhttps://ieeexplore.ieee.org/document/8353676/
DOI10.1109/IRPS.2018.8353676