| Title | Process for patterning features in poly(acrylic acid) for microelectronic applications |
| Publication Type | Journal Article |
| Year of Publication | 2017 |
| Authors | Feng, Y., C. S. Smith, and S. L. Burkett |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 27 |
| Issue | 5 |
| Pagination | 055007 |
| Date Published | Jan-05-2017 |
| ISSN | 0960-1317 |
| URL | http://stacks.iop.org/0960-1317/27/i=5/a=055007?key=crossref.561d96e18290d156244e50ac207f3528 |
| DOI | 10.1088/1361-6439/aa6673 |
| Short Title | J. Micromech. Microeng. |
