Process for patterning features in poly(acrylic acid) for microelectronic applications

TitleProcess for patterning features in poly(acrylic acid) for microelectronic applications
Publication TypeJournal Article
Year of Publication2017
AuthorsFeng, Y., C. S. Smith, and S. L. Burkett
JournalJournal of Micromechanics and Microengineering
Volume27
Issue5
Pagination055007
Date PublishedJan-05-2017
ISSN0960-1317
URLhttp://stacks.iop.org/0960-1317/27/i=5/a=055007?key=crossref.561d96e18290d156244e50ac207f3528
DOI10.1088/1361-6439/aa6673
Short TitleJ. Micromech. Microeng.