Method for patterning poly(acrylic acid) sacrificial layers for use in solder-based self-assembly

TitleMethod for patterning poly(acrylic acid) sacrificial layers for use in solder-based self-assembly
Publication TypeJournal Article
Year of Publication2017
AuthorsSmith, C. S., Y. Feng, and S. L. Burkett
JournalJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Volume35
Issue3
Pagination03D102
Date PublishedJan-05-2017
ISSN2166-2746
URLhttp://avs.scitation.org/doi/10.1116/1.4979004
DOI10.1116/1.4979004
Short TitleJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena