Title | Method for patterning poly(acrylic acid) sacrificial layers for use in solder-based self-assembly |
Publication Type | Journal Article |
Year of Publication | 2017 |
Authors | Smith, C. S., Y. Feng, and S. L. Burkett |
Journal | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena |
Volume | 35 |
Issue | 3 |
Pagination | 03D102 |
Date Published | Jan-05-2017 |
ISSN | 2166-2746 |
URL | http://avs.scitation.org/doi/10.1116/1.4979004 |
DOI | 10.1116/1.4979004 |
Short Title | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena |