Title | Mixed Al and Si doping in ferroelectric HfO 2 thin films |
Publication Type | Journal Article |
Year of Publication | 2015 |
Authors | Lomenzo, P. D., Q. Takmeel, C. Zhou, C-C. Chung, S. Moghaddam, J. L. Jones, and T. Nishida |
Journal | Applied Physics Letters |
Volume | 107 |
Issue | 24 |
Pagination | 242903 |
Date Published | Feb-12-2016 |
ISSN | 0003-6951 |
URL | http://aip.scitation.org/doi/10.1063/1.4937588 |
DOI | 10.1063/1.4937588 |
Short Title | Appl. Phys. Lett. |