Title | Double-side exposure UV-LED CNC lithography for fine 3D microfabrication |
Publication Type | Conference Paper |
Year of Publication | 2017 |
Authors | Kim, J., Y-K. Yoon, and M. G. Allen |
Conference Name | 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Publisher | IEEE |
Conference Location | Los Angeles, CA, USA |
URL | http://ieeexplore.ieee.org/document/8017065/ |
DOI | 10.1109/NEMS.2017.8017065 |