Title | Electrothermally actuated MEMS mirrors - Design, modeling, and applications |
Publication Type | Book Chapter |
Year of Publication | 2017 |
Book Title | Optical MEMS, Nanophotonics, and Their Applications |
Chapter | 7 |
Publisher | CRC Press |
City | Boca Raton |
URL | https://www.taylorfrancis.com/books/9781315151557 |
DOI | 10.1201/9781315151557 |