Title | High-Q silicon fin bulk acoustic resonators for signal processing beyond the UHF |
Publication Type | Conference Paper |
Year of Publication | 2017 |
Authors | Ramezani, M., M. Ghatge, and R. Tabrizian |
Conference Name | 2017 IEEE International Electron Devices Meeting (IEDM) |
Publisher | IEEE |
Conference Location | San Francisco, CA |
URL | http://ieeexplore.ieee.org/document/8268524/ |
DOI | 10.1109/IEDM.2017.8268524 |