Title | d15-Enhanced shear-extensional aluminum nitride resonators with k 2 t> 4.4% for wide-band filters |
Publication Type | Conference Paper |
Year of Publication | 2017 |
Authors | Jo, B., M. Ghatge, and R. Tabrizian |
Conference Name | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
Publisher | IEEE |
Conference Location | Kaohsiung, Taiwan |
URL | http://ieeexplore.ieee.org/document/7993996/ |
DOI | 10.1109/TRANSDUCERS.2017.7993996 |