Title | A Passive Wireless Microelectromechanical Pressure Sensor for Harsh Environments |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Rogers, J. E., Y-K. Yoon, M. Sheplak, and J. W. Judy |
Journal | Journal of Microelectromechanical Systems |
Volume | 27 |
Issue | 1 |
Pagination | 73 - 85 |
Date Published | Jan-02-2018 |
ISSN | 1057-7157 |
URL | http://ieeexplore.ieee.org/document/8125085/ |
DOI | 10.1109/JMEMS.2017.2774000 |
Short Title | J. Microelectromech. Syst. |