| Title | An integrated optoelectronic position sensor for MEMS scanning mirrors |
| Publication Type | Conference Paper |
| Year of Publication | 2017 |
| Authors | Cheng, X., H. Lu, Z. Lou, H. Xie, W. Wang, and M. Zheng |
| Conference Name | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
| Publisher | IEEE |
| Conference Location | Kaohsiung |
| URL | http://ieeexplore.ieee.org/document/7994508/ |
| DOI | 10.1109/TRANSDUCERS.2017.7994508 |
