A 2-axis MEMS scanning micromirror with a 45° auto-positioning mechanism for endoscopic probe

TitleA 2-axis MEMS scanning micromirror with a 45° auto-positioning mechanism for endoscopic probe
Publication TypeConference Paper
Year of Publication2017
AuthorsTanguy, Q. A. A., S. Bargiel, C. Duan, W. Wang, P. Struk, H. Xie, P. Lutz, and C. Gorecki
Conference Name2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
PublisherIEEE
Conference LocationKaohsiung, Taiwan
URLhttp://ieeexplore.ieee.org/document/7994450/
DOI10.1109/TRANSDUCERS.2017.7994450