| Title | Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators |
| Publication Type | Book Chapter |
| Year of Publication | 2017 |
| Authors | Tabrizian, R. |
| Editor | Bhugra, H., and G. Piazza |
| Book Title | Microsystems and Nanosystems |
| Volume | Piezoelectric MEMS Resonators |
| Pagination | 283 - 298 |
| Publisher | Springer International Publishing |
| City | Cham |
| ISBN Number | 978-3-319-28686-0 |
| ISBN | 2198-0063 |
| URL | https://link.springer.com/chapter/10.1007/978-3-319-28688-4_12 |
| DOI | 10.1007/978-3-319-28688-410.1007/978-3-319-28688-4_12 |
