Title | Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators |
Publication Type | Book Chapter |
Year of Publication | 2017 |
Authors | Tabrizian, R. |
Editor | Bhugra, H., and G. Piazza |
Book Title | Microsystems and Nanosystems |
Volume | Piezoelectric MEMS Resonators |
Pagination | 283 - 298 |
Publisher | Springer International Publishing |
City | Cham |
ISBN Number | 978-3-319-28686-0 |
ISBN | 2198-0063 |
URL | https://link.springer.com/chapter/10.1007/978-3-319-28688-4_12 |
DOI | 10.1007/978-3-319-28688-410.1007/978-3-319-28688-4_12 |