| Title | A 2-axis electrothermal MEMS micro-scanner with torsional beam |
| Publication Type | Conference Paper |
| Year of Publication | 2016 |
| Authors | Tanguy, Q., C. Duan, W. Wang, H. Xie, S. Bargiel, P. Struk, P. Lutz, and C. Gorecki |
| Conference Name | 2016 International Conference on Optical MEMS and Nanophotonics (OMN) |
| Publisher | IEEE |
| Conference Location | Singapore, Singapore |
| URL | http://ieeexplore.ieee.org/document/7565919/ |
| DOI | 10.1109/OMN.2016.7565919 |
