Title | A Flush-Mount Sensor Package for a MEMS Piezoelectric Microphone with Through-Silicon-Vias for Aircraft Fuselage Arrays |
Publication Type | Conference Proceedings |
Year of Conference | 2016 |
Authors | Reagan, T., J. R. Underbrink, J. Meloy, and M. Sheplak |
Conference Name | Hilton Head 2016 Workshop |