Title | A large-piston scanning electrothermal micromirror with a temperature control frame |
Publication Type | Conference Paper |
Year of Publication | 2016 |
Authors | Luo, J., Z. Chen, Y. Ding, Q. Chen, J. Ding, J. Cheng, and H. Xie |
Conference Name | 2016 International Conference on Optical MEMS and Nanophotonics (OMN) |
Publisher | IEEE |
Conference Location | Singapore, Singapore |
URL | http://ieeexplore.ieee.org/document/7565914/ |
DOI | 10.1109/OMN.2016.7565914 |