| Title | A high fill factor 1×20 MEMS mirror array based on ISC bimorph structure |
| Publication Type | Conference Paper |
| Year of Publication | 2016 |
| Authors | Chen, Q., J. Ding, W. Wang, and H. Xie |
| Conference Name | 2016 International Conference on Optical MEMS and Nanophotonics (OMN) |
| Publisher | IEEE |
| Conference Location | Singapore, Singapore |
| URL | http://ieeexplore.ieee.org/document/7565912/ |
| DOI | 10.1109/OMN.2016.7565912 |
