Development of a Hydraulically Smooth Wall Shear Stress Sensor Utilizing Through Silicon Vias

TitleDevelopment of a Hydraulically Smooth Wall Shear Stress Sensor Utilizing Through Silicon Vias
Publication TypeConference Proceedings
Year of Conference2016
AuthorsBarnard, C., D. Mills, J. Meloy, and M. Sheplak
Conference NameHilton Head 2016 Workshop