Title | Computer numerical control (CNC) lithography: light-motion synchronized UV-LED lithography for 3D microfabrication |
Publication Type | Journal Article |
Year of Publication | 2016 |
Authors | Kim, J., Y.-K. Yoon, and M. G. Allen |
Journal | Journal of Micromechanics and Microengineering |
Volume | 26 |
Issue | 3 |
Pagination | 035003 |
Date Published | Jan-03-2016 |
ISSN | 0960-1317 |
URL | http://stacks.iop.org/0960-1317/26/i=3/a=035003?key=crossref.48672cd23d11176177078409057230c6 |
DOI | 10.1088/0960-1317/26/3/035003 |
Short Title | J. Micromech. Microeng. |