Computer numerical control (CNC) lithography: light-motion synchronized UV-LED lithography for 3D microfabrication

TitleComputer numerical control (CNC) lithography: light-motion synchronized UV-LED lithography for 3D microfabrication
Publication TypeJournal Article
Year of Publication2016
AuthorsKim, J., Y.-K. Yoon, and M. G. Allen
JournalJournal of Micromechanics and Microengineering
Volume26
Issue3
Pagination035003
Date PublishedJan-03-2016
ISSN0960-1317
URLhttp://stacks.iop.org/0960-1317/26/i=3/a=035003?key=crossref.48672cd23d11176177078409057230c6
DOI10.1088/0960-1317/26/3/035003
Short TitleJ. Micromech. Microeng.