| Title | Thermoelastically Actuated Acoustic Proximity Sensor with Integrated Through-Wafer Interconnects |
| Publication Type | Conference Paper |
| Year of Publication | 2002 |
| Authors | Chandrasekaran, V., E. Chow, T. Kenny, T. Nishida, L. Cattafesta, B. V. Sankar, and M. Sheplak |
| Conference Name | Solid-State Sensor and Actuator Workshop |
| Date Published | June |
| Conference Location | Hilton Head, SC |
