Scaling Relations for Piezoresistive Microphones

TitleScaling Relations for Piezoresistive Microphones
Publication TypeConference Paper
Year of Publication2000
AuthorsSaini, R., S. Bhardwaj, T. Nishida, and M. Sheplak
Conference NameInternational Mechanical Engineering Congress and Exposition
Date PublishedNovember
Conference LocationOrlando, FL