A Low-Power Low-Noise Capacitive Sensing Amplifier for Integrated CMOS-MEMS Inertial Sensors

TitleA Low-Power Low-Noise Capacitive Sensing Amplifier for Integrated CMOS-MEMS Inertial Sensors
Publication TypeConference Paper
Year of Publication2004
AuthorsFang, D., and H. Xie
Conference NameThe IASTED International Conference on Circuits, Signals, and Systems
Date PublishedNovember
Conference LocationClearwater Beach, FL